Alignment apparatus

An alignment apparatus for align a treatment object having a notch, the alignment apparatus comprising:

• a support member on which the treatment object is positioned;
• a driving unit configured to rotate the support member;
• a pushing member configured to move the treatment object to a proper location on the support member by applying a force to a side surface of the treatment object positioned on the support member;
• a notch detecting unit configured to detect whether the notch of the treatment object is located at a specific location;
• a controller configured to control the driving unit such that the notch of the treatment object is located at the specific location by rotating the support member;
• and
• a rotation driving unit configured to rotate the pushing member,
• wherein the pushing member includes:
• a rotary member provided to be movable between a first location and a second location and having a rotational body shape that is rotatable about a vertical rotary shaft;
• and
• a rotation support part, to one end of which the rotary member is coupled and which is provided to be rotatable about an opposite end thereof along a horizontal direction,
• wherein the first location is a location at which a side surface of the rotary member contacts a side surface of the treatment object located at a proper location on the support member, and the second location is a location at which a side surface of the rotary member is spaced apart from a side surface of the treatment object located at a proper location on the support member by a specific distance,
• wherein the pushing member includes:
• a first pushing member and a second pushing member that are adjacent to each other such that the opposite ends of the first pushing member and the second pushing member face each other,
• wherein the rotation driving unit includes:
• a first air cylinder configured to linear move a piston toward a space between the opposite end of the first pushing member and the opposite end of the second pushing member along a direction that is perpendicular to a direction in which the first pushing member and the second pushing member are arranged, when viewed from the top;
• a first crank member having a guide groove, a lengthwise direction of which is provided in a direction that is perpendicular to a movement direction of the piston when viewed from the top and one end of which is connected to the piston;
• a first connecting shaft, one end of which is moved along the guide groove and an opposite end of which is connected to the opposite end of the first pushing member;
• a second connecting shaft, one end of which is moved along the guide groove and an opposite end of which is connected to the opposite end of the second pushing member;
• and
• an air supply/discharge part configured to supply and discharge air to and from the first air cylinder.