Alignment apparatus
AssigneeSEMIgear, Inc.
InventorsSeockhwi LEE, Wonchang CHOI
Life of this patent
Estimating the term…
Abstract
Disclosed is an alignment apparatus that aligns a treatment object having a notch. The alignment apparatus includes a support member on which the treatment object is positioned, a driving unit configured to rotate the support member, a pushing member configured to move the treatment object to a proper location on the support member by applying a force to a side surface of the treatment object positioned on the support member, a notch detecting unit configured to detect whether the notch of the treatment object is located at a specific location, and a controller configured to control the driving unit such that the notch of the treatment object is located at the specific location by rotating the support member.
Claims20
An alignment apparatus for align a treatment object having a notch, the alignment apparatus comprising:
- a support member on which the treatment object is positioned;
- a driving unit configured to rotate the support member;
- a pushing member configured to move the treatment object to a proper location on the support member by applying a force to aside surface of the treatment object positioned on the support member;
- a notch detecting unit configured to detect whether the notch of the treatment object is located at a specific location;
- and
- a controller configured to control the driving unit such that the notch of the treatment object is located at the specific location by rotating the support member.
Dependencies are inferred from the claim text.