Transfer unit and substrate treatment apparatus including the same
AssigneeSemes Co., Ltd.
InventorDuk Hyun Son
Life of this patent
Estimating the term…
Abstract
Provided are a transfer unit and a substrate treatment apparatus which can stably vacuum-adsorb a substrate and can be used for a long time. The transfer unit includes: a robot arm; and an end effector connected to the robot arm, wherein the end effector includes: a body; a vacuum hole formed in the body; and a pad installed on the body to surround the vacuum hole and including a first pad layer and a second pad layer stacked sequentially, wherein the first pad layer has greater elasticity than the second pad layer, and the second pad layer has greater hardness than the first pad layer.
Claims17
A transfer unit comprising:
- a robot arm;
- and
- an end effector connected to the robot arm,
- wherein the end effector comprises:
- a body;
- a vacuum hole formed in the body;
- and
- a pad installed on the body to surround the vacuum hole and comprising a first pad layer and a second pad layer stacked sequentially,
- wherein the first pad layer has greater elasticity than the second pad layer, and the second pad layer has greater hardness than the first pad layer, and
- wherein the second pad layer comprises
- a first portion along an outer edge of the first pad layer, and
- a second portion between the first portion and the vacuum hole, the first portion and the second portion both configured to physically contact a substrate on the pad.
A transfer unit comprising:
- a robot arm;
- and
- an end effector connected to the robot arm,
- wherein the end effector comprises:
- a body;
- a vacuum hole formed in the body;
- and
- a pad installed on the body to surround the vacuum hole and comprising a first pad layer and a second pad layer stacked sequentially,
- wherein the first pad layer is formed on the body, a lower surface of the second pad layer directly contacts the first pad layer, an upper surface of the second pad layer directly contacts a substrate, the first pad layer has greater elasticity than the second pad layer, the second pad layer has greater hardness than the first pad layer, a width of the first pad layer is greater than a width of the second pad layer, the second pad layer is formed along an outer edge of the first pad layer, and the first pad layer and the second pad layer have an elliptical shape, and
- wherein the second pad layer comprises
- a first portion along the outer edge of the first pad layer, and
- a second portion between the first portion and the vacuum hole, the first portion and the second portion both configured to physically contact a substrate on the pad.
A substrate treatment apparatus comprising:
- an index module comprising a load port on which a container having a substrate accommodated therein is placed and an index robot for transferring the substrate;
- and
- a process module comprising a process chamber and a main transfer robot transferring the substrate to the process chamber,
- wherein the index robot or the main transfer robot comprises a robot arm and an end effector connected to the robot arm, and the end effector comprises a body, a vacuum hole formed in the body, and a pad installed on the body to surround the vacuum hole and comprising a first pad layer and a second pad layer stacked sequentially, wherein the first pad layer has greater elasticity than the second pad layer, and the second pad layer has greater hardness than the first pad layer, and
- wherein the second pad layer comprises
- a first portion along an outer edge of the first pad layer, and
- a second portion between the first portion and the vacuum hole, the first portion and the second portion both configured to physically contact a substrate on the pad.
Dependencies are inferred from the claim text.