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US 12,540,041 B2Granted
End effector and substrate processing apparatus including end effector
AssigneeASM IP Holding B.V.
InventorYuki Dammura
Life of this patent
Estimating the term…
Abstract
An end effector is disclosed. Exemplary end effector includes a paddle, wherein a proximal end of the paddle is provided with a rear protrusion for positioning a substrate; a ring extending from the paddle, wherein the ring is provided with a circular protrusion for supporting the substrate; and a blade extending from the ring, wherein a distal end of the blade is provided with a front protrusion for positioning a substrate.
Claims20
An end effector for transporting a substrate, comprising:
- a paddle, wherein a proximal end of the paddle is provided with a rear protrusion for positioning a substrate;
- a ring extending from the paddle, wherein the ring is provided with a circular protrusion for supporting the substrate, wherein an outermost perimeter edge of the circular protrusion forms a top surface configured to underlie and support a backside of the substrate when the substrate is mounted of the ring;
- and
- a blade extending from the ring, wherein a distal end of the blade is provided with a front protrusion for positioning the substrate, wherein a substrate-positioning area of the end effector is defined by the front protrusion and the rear protrusion.
1 more element
A substrate processing apparatus comprising:
- a reaction chamber for processing a substrate;
- a substrate handling chamber attached to the reaction chamber;
- a backend robot disposed in the substrate handling chamber, the backend robot including a robotic arm;
- an end effector attached to the robotic arm, the end effector including:
- a paddle, wherein a proximal end of the paddle is provided with a rear protrusion for positioning the substrate,
- a ring extending from the paddle, wherein the ring is provided with a circular protrusion for supporting the substrate, wherein an outermost perimeter edge of the circular protrusion forms a top surface configured to underlie and support a backside of the substrate when the substrate is mounted on the ring, and
- a blade extending from the ring, wherein a distal end of the blade is provided with a front protrusion for positioning the substrate, wherein a substrate-positioning area of the end effector is defined by the front protrusion and the rear protrusion;
- and
- a load lock chamber for loading or unloading the substrate, the load lock chamber being attached to the substrate handling chamber.
6 more elements
An end effector for transporting a substrate, comprising:
- a paddle having a proximal end and a distal end, wherein the proximal end of the paddle is provided with a first rear protrusion and a second rear protrusion for positioning a substrate;
- a ring extending from the distal end of the paddle, wherein the ring is provided with a circular protrusion for supporting the substrate, wherein an outermost perimeter edge of the circular protrusion forms a top surface configured to underlie and support a backside of the substrate when the substrate is mounted on the ring;
- a first blade extending from a distal end of the ring, wherein a distal end of the first blade is provided with a first front protrusion for positioning the substrate;
- and
- a second blade extending from the distal end of the ring, wherein a distal end of the second blade is provided with a second front protrusion for positioning the substrate,
- wherein a substrate-positioning area of the end effector is defined by the first front protrusion, the second front protrusion, the first rear protrusions, and the second rear protrusion.
3 more elements
Dependencies are inferred from the claim text.