Y10S 414/141
Includes means for gripping wafer
Official title: includes means for gripping wafer
Y10S414/141 (Includes means for gripping wafer) appears on 633 US grants and 297 published applications in this corpus.
Search patents in Y10S- Granted patents
- 633
- Published applications
- 297
- Assignees
- 288
- Inventors
- 1,066
- Latest grant
- 31 Mar 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 2 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 1 | 0 |
| 1983 | 1 | 0 |
| 1984 | 3 | 0 |
| 1985 | 8 | 0 |
| 1986 | 9 | 0 |
| 1987 | 5 | 0 |
| 1988 | 7 | 0 |
| 1989 | 5 | 0 |
| 1990 | 13 | 0 |
| 1991 | 8 | 0 |
| 1992 | 7 | 0 |
| 1993 | 7 | 0 |
| 1994 | 7 | 0 |
| 1995 | 11 | 0 |
| 1996 | 16 | 0 |
| 1997 | 25 | 0 |
| 1998 | 32 | 0 |
| 1999 | 39 | 0 |
| 2000 | 46 | 0 |
| 2001 | 49 | 13 |
| 2002 | 43 | 26 |
| 2003 | 40 | 49 |
| 2004 | 31 | 34 |
| 2005 | 31 | 30 |
| 2006 | 27 | 16 |
| 2007 | 15 | 21 |
| 2008 | 12 | 23 |
| 2009 | 15 | 21 |
| 2010 | 29 | 10 |
| 2011 | 15 | 11 |
| 2012 | 21 | 12 |
| 2013 | 5 | 8 |
| 2014 | 13 | 5 |
| 2015 | 14 | 3 |
| 2016 | 4 | 1 |
| 2017 | 1 | 0 |
| 2018 | 2 | 2 |
| 2019 | 2 | 1 |
| 2020 | 1 | 4 |
| 2021 | 4 | 1 |
| 2022 | 1 | 1 |
| 2023 | 2 | 2 |
| 2024 | 1 | 2 |
| 2025 | 1 | 0 |
| 2026 | 2 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Transfer unit and substrate treatment apparatus including the same31 Mar 2026US 12,593,653 B2Semes Co., Ltd.
- End effector and substrate processing apparatus including end effector3 Feb 2026US 12,540,041 B2ASM IP Holding B. V.
- Apparatus, system and method for providing an end effector16 Dec 2025US 12,496,733 B2Jabil Inc.
- Apparatus, system and method for providing an end effector23 Jul 2024US 12,042,930 B2Jabil Inc.
- Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism31 Oct 2023US 11,801,598 B2Brooks Automation US, LLC
- Apparatus, system and method for providing an end effector21 May 2026US 2026/0138288 A1Jabil Inc.
- Apparatus, system and method for providing an end effector26 Dec 2024US 2024/0424688 A1Jabil Inc.
- Transfer unit and substrate treatment apparatus including the same20 Jun 2024US 2024/0203776 A1Semes Co., Ltd.
- Apparatus, system and method for providing an end effector7 Sep 2023US 2023/0278235 A1Jabil Inc.
- End effector and substrate processing apparatus including end effector23 Mar 2023US 2023/0091979 A1ASM IP Holding B. V.
Most cited
By later US patents
- Semiconductor processing system with gas curtain612US 5,997,588 AAdvanced Semiconductor Materials America, Inc. · 1999
- Semiconductor processing apparatus with substrate-supporting mechanism585US 6,435,798 B1ASM Japan K .K. · 2002
- Device and method for handling substrates by means of a self-leveling vacuum system in epitaxial induction554US 6,648,974 B1Lpe S.P.A. · 2003
- Ultra low contact area end effector545US 7,055,875 B2Asyst Technologies, Inc. · 2006
- Spring retained end effector contact pad544US 8,864,202 B1Varian Semiconductor Equipment Associates, Inc. · 2014