Spring retained end effector contact pad
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorMichael A. Schrameyer
Life of this patent
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AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorMichael A. Schrameyer
Estimating the term…
An end effector is disclosed for use in substrate processing. The end effector includes a effector body portion, a contact pad pocket formed in the end effector body, a spring retaining pocket formed in the end effector body adjacent the contact pad pocket and extending to an edge of the end effector body, and a pair of through-holes extending from the spring retaining pocket to the contact pad pocket. The end effector can include a contact pad seated within the contact pad pocket, the contact pad having at least one retaining channel formed therein, and a retaining spring having a pair of retaining arms extending from the retaining spring pocket through the through-holes and into the contact pad pocket. The retaining arms may extend at least partially into the at least one retaining channel of the contact pad and may thereby restrict movement of the contact pad.
An end effector comprising:
An end effector comprising:
Dependencies are inferred from the claim text.