Back to results
US 2023/0091979 A1Published application
End effector and substrate processing apparatus including end effector
AssigneeASM IP Holding B.V.
InventorYuki Dammura
Life of this patent
Estimating the term…
Abstract
An end effector is disclosed. Exemplary end effector includes a paddle, wherein a proximal end of the paddle is provided with a rear protrusion for positioning a substrate; a ring extending from the paddle, wherein the ring is provided with a circular protrusion for supporting the substrate; and a blade extending from the ring, wherein a distal end of the blade is provided with a front protrusion for positioning a substrate.
Claims12
An end effector for transporting a substrate, comprising:
- a paddle, wherein a proximal end of the paddle is provided with a rear protrusion for positioning a substrate;
- a ring extending from the paddle, wherein the ring is provided with a circular protrusion for supporting the substrate;
- and
- a blade extending from the ring, wherein a distal end of the blade is provided with a front protrusion for positioning a substrate.
1 more element
Dependencies are inferred from the claim text.