Y10S 148/147
Silicides
Y10S148/147 (Silicides) appears on 182 US grants and 0 published applications in this corpus.
Search patents in Y10S- Granted patents
- 182
- Published applications
- 0
- Assignees
- 76
- Inventors
- 312
- Latest grant
- 13 Jun 2000
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 1 | 0 |
| 1978 | 5 | 0 |
| 1979 | 6 | 0 |
| 1980 | 4 | 0 |
| 1981 | 8 | 0 |
| 1982 | 5 | 0 |
| 1983 | 2 | 0 |
| 1984 | 1 | 0 |
| 1985 | 2 | 0 |
| 1986 | 10 | 0 |
| 1987 | 10 | 0 |
| 1988 | 18 | 0 |
| 1989 | 16 | 0 |
| 1990 | 15 | 0 |
| 1991 | 16 | 0 |
| 1992 | 6 | 0 |
| 1993 | 9 | 0 |
| 1994 | 9 | 0 |
| 1995 | 11 | 0 |
| 1996 | 10 | 0 |
| 1997 | 3 | 0 |
| 1998 | 9 | 0 |
| 1999 | 2 | 0 |
| 2000 | 2 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Method for fabricating semiconductor device with polycide structure for electrode or interconnect13 Jun 2000US 6,074,925 ANEC Corporation
- Method of fabricating semiconductor devices with self-aligned silicide15 Feb 2000US 6,025,241 AUnited Microelectronics Corp.
- Elevated source/drain salicide CMOS technology30 Nov 1999US 5,994,191 AAdvanced Micro Devices, Inc.
- Silicon semiconductor substrate and method of fabricating the same13 Apr 1999US 5,894,037 ANEC Corporation
- Integrated circuit with a metal silicide film uniformly formed10 Nov 1998US 5,834,368 ANEC Corporation
No published applications in this class yet.
Most cited
By later US patents
- Chemical vapor deposition technique for depositing titanium silicide on semiconductor wafers1,159US 5,278,100 AMicron Technology, Inc. · 1994
- Method of producing titanium nitride MOS device gate electrode640US 4,570,328 AMotorola, Inc. · 1986
- Process for making integrated circuits having titanium nitride triple interconnect196US 4,804,636 ATexas Instruments Incorporated · 1989
- Bonded wafer processing with metal silicidation151US 5,569,620 AHarris Corporation · 1996
- Tungsten silicide (WSi.sub.x) deposition process for semiconductor manufacture113US 5,231,056 AMicron Technology, Inc. · 1993