Y10S 148/091
Laser beam processing of fets
Y10S148/091 (Laser beam processing of fets) appears on 70 US grants and 5 published applications in this corpus.
Search patents in Y10S- Granted patents
- 70
- Published applications
- 5
- Assignees
- 30
- Inventors
- 93
- Latest grant
- 3 Jul 2007
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1980 | 2 | 0 |
| 1981 | 3 | 0 |
| 1982 | 2 | 0 |
| 1983 | 12 | 0 |
| 1984 | 7 | 0 |
| 1985 | 1 | 0 |
| 1986 | 4 | 0 |
| 1987 | 3 | 0 |
| 1988 | 3 | 0 |
| 1989 | 2 | 0 |
| 1990 | 2 | 0 |
| 1991 | 9 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 3 | 0 |
| 1995 | 2 | 0 |
| 1996 | 1 | 0 |
| 1997 | 2 | 0 |
| 1998 | 2 | 0 |
| 1999 | 2 | 0 |
| 2000 | 1 | 0 |
| 2001 | 0 | 0 |
| 2002 | 2 | 1 |
| 2003 | 1 | 2 |
| 2004 | 0 | 1 |
| 2005 | 2 | 1 |
| 2006 | 0 | 0 |
| 2007 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Semiconductor device and method of fabricating the same3 Jul 2007US 7,238,558 B2Semiconductor Energy Laboratory Co.Ltd.
- Semiconductor device method of manufacturing13 Dec 2005US 6,974,732 B2Semiconductor Energy Laboratory Co.Ltd.
- Semiconductor device and method of fabricating the same29 Mar 2005US 6,872,605 B2Semiconductor Energy Laboratory Co.Ltd.
- Method and structure for crystallizing a film26 Aug 2003US 6,610,998 B1Goldstar Electron Co., Ltd.
- Method of fabricating a semiconductor device12 Nov 2002US 6,479,331 B1Semiconductor Energy Laboratory Co.Ltd.
- Semiconductor device and method of fabricating the same14 Jul 2005US 2005/0153488 A1Semiconductor Energy Laboratory Co.Ltd.
- Semiconductor device and fabricating method thereof25 Mar 2004US 2004/0058486 A1Semiconductor Energy Laboratory Co.Ltd.
- Semiconductor device and method of fabricating the same20 Feb 2003US 2003/0036222 A1Semiconductor Energy Laboratory Co.Ltd.
- Semiconductor device and fabricating method thereof16 Jan 2003US 2003/0010982 A1Semiconductor Energy Laboratory Co.Ltd.
- Semiconductor device and fabricating method thereof21 Feb 2002US 2002/0022350 A1Semiconductor Energy Laboratory Co.Ltd.
Most cited
By later US patents
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- Method of fabricating display with semiconductor circuits on monolithic structure and flat panel display produced thereby189US 4,409,724 ATexas Instruments Incorporated · 1983
- MOS/SOS Process153US 4,272,880 AIntel Corporation · 1981
- Method of fabricating a TFT153US 5,403,762 ASemiconductor Energy Laboratory Co.Ltd. · 1995
- Method for fabricating thin film transistor device139US 5,817,548 ASony Corporation · 1998