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US 6,610,998 B1Granted
Method and structure for crystallizing a film
AssigneeGoldstar Electron Co., Ltd.
InventorMin Hwa Park
Life of this patent
Estimating the term…
Abstract
A method and structure for crystallizing film is disclosed. The method includes the steps of forming a film on a substrate, forming a lens on the film to focus an electromagnetic wave on the film and directing the electromagnetic wave on the film inclusive of the lens to crystallize the film.
Claims9
A structure for crystallizing a film, comprising:
- a film formed on a substrate;
- and
- a micro-lens formed in contact with a predetermined portion of the film to focus an electro-magnetic wave on the predetermined portion of the film, causing said film to crystallize.
A structure for crystallizing a film, comprising:
- a film formed on a substrate;
- and
- a micro-lens, formed of an impurity-containing layer, formed in contact with a predetermined portion of the film to focus an electromagnetic wave on the predetermined portion of the film.
A structure for crystallizing a film, comprising:
- a film formed on a substrate;
- and
- a micro-lens formed in contact with a predetermined portion of the film to focus an electromagnetic wave generated by a laser on the predetermined portion of the film.
A structure for crystallizing a film, comprising:
- a film formed on a substrate;
- and
- a micro-lens formed in contact with a predetermined portion of the film to focus an electromagnetic wave on the predetermined portion of the film to create a partial temperature difference on the film.
Dependencies are inferred from the claim text.