Y10S 148/043
Dual dielectric
Y10S148/043 (Dual dielectric) appears on 83 US grants and 1 published applications in this corpus.
Search patents in Y10S- Granted patents
- 83
- Published applications
- 1
- Assignees
- 47
- Inventors
- 155
- Latest grant
- 18 Feb 2003
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 19 | 0 |
| 1977 | 2 | 0 |
| 1978 | 5 | 0 |
| 1979 | 1 | 0 |
| 1980 | 2 | 0 |
| 1981 | 1 | 0 |
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 1 | 0 |
| 1985 | 3 | 0 |
| 1986 | 4 | 0 |
| 1987 | 5 | 0 |
| 1988 | 0 | 0 |
| 1989 | 5 | 0 |
| 1990 | 4 | 0 |
| 1991 | 8 | 0 |
| 1992 | 2 | 0 |
| 1993 | 5 | 0 |
| 1994 | 3 | 0 |
| 1995 | 2 | 0 |
| 1996 | 1 | 0 |
| 1997 | 3 | 0 |
| 1998 | 2 | 0 |
| 1999 | 0 | 0 |
| 2000 | 3 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 1 | 1 |
By publication year. Applications have been published since 2001.
Recent patents
- CVD apparatus18 Feb 2003US 6,520,189 B1Semiconductor Energy Laboratory Co.Ltd.
- Insulation layer structure and method for making the same21 Nov 2000US 6,150,220 AHyundai Electronics Industries Co., Ltd.
- Method for manufacturing a polysilicon TFT with a variable thickness gate oxide26 Sep 2000US 6,124,153 ASamsung Electronics Co., Ltd.
- CVD apparatus11 Jan 2000US 6,013,338 ASemiconductor Energy Laboratory Co.Ltd.
- Non-uniformly nitrided gate oxide and method15 Sep 1998US 5,808,348 AHarris Corporation
Most cited
By later US patents
- Method of depositing films using photo-CVD with chamber plasma cleaning360US 4,950,624 ASemiconductor Energy Laboratory Co.Ltd. · 1990
- Method for forming trench isolation structures190US 4,571,819 ANCR Corporation · 1986
- Self-aligned dielectric assisted planarization process134US 4,996,165 ARockwell International Corporation · 1991
- Semiconductor planarization process for submicron devices121US 5,003,062 ATaiwan Semiconductor Manufacturing Company.Ltd · 1991
- Method of making an interconnect structure with an integrated low density dielectric110US 5,488,015 ATexas Instruments Incorporated · 1996