H03H 9/1057
For microelectro-mechanical devices
Official title: {for microelectro-mechanical devices}
H03H9/1057 (For microelectro-mechanical devices) appears on 202 US grants and 230 published applications in this corpus.
Search patents in H03H- Granted patents
- 202
- Published applications
- 230
- Assignees
- 82
- Inventors
- 300
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2001 | 4 | 4 |
| 2002 | 4 | 2 |
| 2003 | 1 | 1 |
| 2004 | 2 | 1 |
| 2005 | 0 | 13 |
| 2006 | 5 | 5 |
| 2007 | 6 | 7 |
| 2008 | 3 | 10 |
| 2009 | 4 | 3 |
| 2010 | 6 | 5 |
| 2011 | 9 | 7 |
| 2012 | 1 | 4 |
| 2013 | 7 | 6 |
| 2014 | 7 | 8 |
| 2015 | 5 | 2 |
| 2016 | 8 | 7 |
| 2017 | 5 | 12 |
| 2018 | 4 | 19 |
| 2019 | 12 | 16 |
| 2020 | 18 | 18 |
| 2021 | 17 | 22 |
| 2022 | 13 | 11 |
| 2023 | 16 | 21 |
| 2024 | 23 | 9 |
| 2025 | 11 | 11 |
| 2026 | 11 | 6 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- MEMS resonator6 Oct 2026US 12,753,070 B2SiTime Corporation
- Resonance device with anti-diffusion layer and resonance device manufacturing method25 Aug 2026US 12,719,443 B2Murata Manufacturing Co., Ltd.
- Microelectromechanical resonator18 Aug 2026US 12,712,521 B2SiTime Corporation
- Micro-mechanical resonator having out-of-phase and out-of-plane flexural mode resonator portions11 Aug 2026US 12,706,581 B2Texas Instruments Incorporated
- Dual resonator structure for oven-controlled MEMS oscillators, including related apparatuses19 May 2026US 12,633,873 B2Microchip Technology Incorporated
- MEMS Resonator13 Aug 2026US 2026/0233990 A1SiTime Corporation
- MEMS Resonator9 Apr 2026US 2026/0100692 A1SiTime Corporation
- Mems vibrator2 Apr 2026US 2026/0091972 A1Rohm Co., Ltd.
- Zt-quartz resonator12 Mar 2026US 2026/0074673 A1Micro Crystal AG
- Resonator element1 Jan 2026US 2026/0005666 A1Seiko Epson Corporation
Most cited
By later US patents
- Method of fabrication of a microstructure having an internal cavity302US 6,297,072 B1Interuniversitair Micro-Elktronica Centrum (IMEC VZW) · 2001
- Process for making microstructures and microstructures made thereby196US 6,232,150 B1The Regents of the University of Michigan · 2001
- Vertically integrated MEMS structure with electronics in a hermetically sealed cavity172US 7,104,129 B2InvenSense, Inc. · 2006
- Methods for producing packaged integrated circuit devices & packaged integrated circuit devices produced thereby157US 6,777,767 B2Shellcase Ltd. · 2004
- Vacuum-cavity MEMS resonator109US 6,808,954 B2Intel Corporation · 2004