Micro-mechanical resonator having out-of-phase and out-of-plane flexural mode resonator portions
AssigneeTexas Instruments Incorporated
InventorsHakhamanesh Mansoorzare, Ting-Ta Yen, Jeronimo Segovia-Fernandez, Bichoy Bahr
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Abstract
A method comprises: forming a die including a cavity; coupling an anchor to the die; coupling a first resonator to a side of the anchor, in which the first resonator is suspended over the cavity and is operable to bend towards or away from a bottom of the cavity; and coupling a second resonator to the side of the anchor, in which the second resonator is suspended over the cavity, at least a part of the first resonator is laterally between the side of the anchor and a part of the second resonator, and the first resonator is operable to bend in an opposite direction from the second resonator.
Claims16
A method comprising:
- forming a die including a cavity;
- coupling an anchor to the die;
- coupling a first resonator to a side of the anchor, in which the first resonator is suspended over the cavity and is operable to bend towards or away from a bottom of the cavity;
- and
- coupling a second resonator to the side of the anchor, in which the second resonator is suspended over the cavity, at least a part of the first resonator is laterally between the side of the anchor and a part of the second resonator, and the first resonator is operable to bend in an opposite direction from the second resonator.
A method comprising:
- forming a die including a cavity;
- coupling an anchor to the die;
- coupling a first resonator to the die and suspended over the cavity, the first resonator coupled to a side of the anchor, and the first resonator operable to bend towards or away from a bottom of the cavity;
- and
- a second resonator coupled to the side of the anchor and suspended over the cavity, at least a part of the first resonator being laterally between the side of the anchor and a part of the first resonator, and the second resonator operable to bend towards or away from the bottom of the cavity.
A method comprising:
- forming a die having a cavity;
- coupling an anchor to the die;
- coupling first, second, third, and fourth piezoelectric beams to a side of the anchor, in which the first through fourth piezoelectric beams are suspended over the cavity;
- coupling a first mass portion between the first and second piezoelectric beams, in which the first mass portion is suspended over the cavity;
- and
- coupling a second mass portion between the third and fourth piezoelectric beams, in which the second mass portion is suspended over the cavity, and at least one of the first piezoelectric beam, the second piezoelectric beam, or the first mass portion is laterally between the side of the anchor and the second mass portion.
Dependencies are inferred from the claim text.