Dual resonator structure for oven-controlled MEMS oscillators, including related apparatuses
AssigneeMicrochip Technology Incorporated
InventorSeungbae Lee
Life of this patent
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Abstract
An apparatus comprises a microelectromechanical system (MEMS) including a semiconductor body. The semiconductor body comprises a first resonator, a second resonator, a supporting portion, and one or more heating elements of a heater. The first resonator is to resonate at a first resonating frequency that is generally frequency-stable over a predetermined temperature range. The second resonator is to resonate at a second resonating frequency that is generally linearly decreasing or increasing as temperature increases over the predetermined temperature range. The supporting portion is to support both the first resonator and the second resonator. The one or more heating elements of the heater are on, or in, the supporting portion.
Claims28
An apparatus comprising:
- a microelectromechanical system (MEMS) including a semiconductor body, the semiconductor body comprising:
- a first resonator, the first resonator to resonate at a first resonating frequency that is generally frequency-stable over a predetermined temperature range;
- a second resonator, the second resonator to resonate at a second resonating frequency that is generally linearly decreasing or increasing as temperature increases over the predetermined temperature range;
- a supporting portion, the supporting portion to support both the first resonator and the second resonator, the supporting portion adjacent and interposed between the first resonator and the second resonator;
- and
- one or more heating elements of a heater distributed on, or in, the supporting portion.
An apparatus comprising:
- an oven-controlled microelectromechanical system (MEMS) timing device comprising:
- a microelectromechanical system including a semiconductor body, the semiconductor
- body comprising:
- a first resonator, the first resonator comprising an outer portion of the semiconductor body, the first resonator to resonate at a first resonating frequency that is generally frequency-stable over a predetermined temperature range;
- at least one first drive electrode of the first resonator;
- at least one first sense electrode of the first resonator;
- a second resonator, the second resonator comprising a central portion of the semiconductor body, the second resonator to resonate at a second resonating frequency that is generally linearly decreasing or increasing as temperature increases over the predetermined temperature range;
- at least one second drive electrode of the second resonator;
- at least one second sense electrode of the second resonator;
- a supporting portion to support both the first resonator and the second resonator;
- and
- one or more heating elements of a heater on, or in, the supporting portion.
An apparatus comprising:
- an oven-controlled microelectromechanical system (MEMS) timing device comprising:
- a microelectromechanical system including a semiconductor body, the semiconductor body comprising:
- a multi-beam resonator, the multi-beam resonator to resonate at a first resonating frequency that is generally frequency-stable over a predetermined temperature range, the multi-beam resonator comprising an outer portion of the semiconductor body;
- a multi-ring resonator, the multi-ring resonator to resonate at a second resonating frequency that decreases as temperature increases over the predetermined temperature range, the multi-ring resonator comprising a central portion of the semiconductor body;
- a supporting portion to support both the multi-beam resonator and the multi-ring resonator;
- and
- one or more heating elements of a heater on, or in, the supporting portion.
Dependencies are inferred from the claim text.