Mems vibrator

Abstract

A MEMS vibrator includes a substrate having a first primary surface and a second primary surface disposed on the opposite side of the first primary surface. The substrate has a cavity recessed from the first primary surface to the second primary surface. A vibrating body is disposed inside the cavity. The vibrating body extends linearly in a first direction along the plane in a plan view of the first primary surface, and vibrates in a second direction that intersects with the first direction along the plane. A plurality of supports disposed inside the cavity support the vibrating body from the second direction at a plurality of supporting positions arranged along the first direction at a certain interval.

Dependencies are inferred from the claim text.