Method of fabrication of a microstructure having an internal cavity
AssigneeInteruniversitair Micro-Elktronica Centrum (IMEC VZW)
InventorsHendrikus A. C. Tilmans, Eric Beyne, Myriam Van de Peer
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Abstract
A method of fabricating a microstructure having an inside cavity. The method includes depositing a first layer or a first stack of layers in a substantially closed geometric configuration on a first substrate. Then, performing an indent on the first layer or on the top layer of said first stack of layers. Then, depositing a second layer or a second stack of layers substantially with said substantially closed geometric configuration on a second substrate. Then, aligning and bonding said first substrate on said second substrate such that a microstructure having a cavity is formed according to said closed geometry configuration.
Claims42
A method of fabricating a microstructure having an inside cavity comprising:
- making at least a first layer in a substantially closed geometric configuration on a first substrate, said substantially closed geometric configuration defining a cavity therein;
- creating an indent in said first layer;
- making at least a second layer substantially with said substantially closed geometric configuration on a second substrate;
- and
- aligning and bonding said first substrate on said second substrate such that a microstructure is formed with said cavity formed within said closed geometric configuration.
A method of fabricating a microstructure having an inside cavity comprising:
- making at least a first stack of layers in a substantially closed geometric configuration on a first substrate thereby defining a cavity within said substantially closed geometric configuration;
- creating an indent on the top layer of said first stack of layers;
- making at least a second stack of layers substantially with said substantially closed geometric configuration on a second substrate;
- and
- aligning and bonding said first substrate on said second substrate such that a microstructure is formed with said cavity within said closed geometric configuration.
A method of fabricating a microstructure having an inside cavity comprising;
- making at least a first stack of layers including a solder layer essentially made of PbSn in a substantially closed geometric, configuration on a first substrate, thereby defining a cavity;
- creating an indent on the top layer of said first stack of layers;
- making at least a second stack of layers substantially with said substantially closed geometric configuration on a second substrate;
- and
- aligning and bonding said first substrate on said second substrate such that a microstructure is formed with said cavity formed within said closed geometric configuration.
A method of fabricating a microstructure having an inside cavity, the method comprising:
- forming at least a first layer in a substantially closed geometric configuration on a first substrate thereby defining a cavity within said substantially closed geometric configuration, wherein said first layer includes a solder layer essentially made of PbSn:
- creating an indent in said first layer;
- making at least a second layer substantially with said substantially closed geometric configuration on a second substrate;
- and
- aligning and bonding said first substrate on said second substrate such that a microstructure is formed with said cavity formed within said closed geometric configuration.
Dependencies are inferred from the claim text.