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US 2026/0074673 A1Published application
Zt-quartz resonator
AssigneeMicro Crystal AG
InventorsSilvio DALLA PIAZZA, Felix STAUB
Life of this patent
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Abstract
A resonator including: a resonator plate having a thickness, and a surface having a maximum length and a width, wherein the resonator plate is a ZT-cut quartz, and a frame including a C-shaped portion having a first arm and a second arm extending at least partially about the lateral edges of the resonator plate and wherein each of the first arm and second arm is connected to the resonator plate by means of tethers.
Claims15
A resonator, comprising:
- a resonator plate having a thickness TR, and a surface SR having a maximum length LR1 and a width WR, wherein the resonator plate is a ZT-cut quartz;
- a frame comprising a C-shaped portion comprising a first arm, and a second arm extending at least partially about the width edges of the resonator plate and wherein each arm, is connected to the resonator plate by means of tethers.
A manufacturing process of a ZT-cut resonator, wherein the process comprises the steps of:
- providing a ZT-cut wafer;
- defining a resonator shape emplacement on the wafer, wherein the resonator shape emplacement includes a resonator frame shape emplacement, a resonator plate shape emplacement and tethers shape emplacements, wherein the tethers shape emplacements are positioned along a central longitudinal axis of the resonator plate shape emplacement and links the lateral sides of the resonator plate shape emplacement to the resonator frame shape emplacement;
- etching a portion of the wafer to obtain the contours of a resonator plate with tethers on both lateral sides of the resonator plate and such that the tethers remains integral with the resonator frame;
- depositing:
- at least two separated electrodes on the resonator plate such that a first electrode has a main portion arranged on one side of a plane passing through the tethers and a second electrode has a main portion arranged on the other side of the plane passing through the tethers;
- two mounting pads on the resonator frame emplacement, and;
- connecting tracks connecting each electrode to a respective mounting pad, and;
- etching the contours of the resonator frame emplacement such as to obtain a resonator.
5 more elements
Dependencies are inferred from the claim text.