H03H 2009/241
Bulk-mode mems resonators
Official title: {Bulk-mode MEMS resonators}
H03H2009/241 (Bulk-mode mems resonators) appears on 128 US grants and 114 published applications in this corpus.
Search patents in H03H- Granted patents
- 128
- Published applications
- 114
- Assignees
- 64
- Inventors
- 190
- Latest grant
- 22 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2003 | 0 | 2 |
| 2004 | 1 | 3 |
| 2005 | 2 | 5 |
| 2006 | 1 | 3 |
| 2007 | 3 | 3 |
| 2008 | 3 | 5 |
| 2009 | 5 | 4 |
| 2010 | 7 | 10 |
| 2011 | 12 | 10 |
| 2012 | 7 | 8 |
| 2013 | 13 | 16 |
| 2014 | 15 | 6 |
| 2015 | 10 | 4 |
| 2016 | 11 | 10 |
| 2017 | 9 | 6 |
| 2018 | 7 | 4 |
| 2019 | 3 | 4 |
| 2020 | 7 | 2 |
| 2021 | 2 | 2 |
| 2022 | 2 | 2 |
| 2023 | 3 | 1 |
| 2024 | 2 | 1 |
| 2025 | 1 | 3 |
| 2026 | 2 | 0 |
By publication year. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- MEMS resonator22 Sep 2026US 12,744,514 B2KYOCERA Technologies Oy
- MEMS resonator10 Mar 2026US 12,574,002 B2KYOCERA Technologies Oy
- Dual-output microelectromechanical resonator and method of manufacture and operation thereof24 Jun 2025US 12,338,119 B2Stathera IP Holdings Inc.
- Method for manufacturing a piezoelectric resonator3 Dec 2024US 12,160,215 B2Robert Bosch GmbH
- Dual-output microelectromechanical resonator and method of manufacture and operation thereof19 Mar 2024US 11,932,530 B2Stathera IP Holdings Inc.
- Thin-film suspended microacoustic resonators for timing applications4 Dec 2025US 2025/0373224 A1University of Central Florida Research Foundation, Inc.
- Mems resonator27 Feb 2025US 2025/0070745 A1KYOCERA Technologies Oy
- Mems resonator13 Feb 2025US 2025/0055440 A1KYOCERA Technologies Oy
- Dual-output microelectromechanical resonator and method of manufacture and operation thereof1 Aug 2024US 2024/0253975 A1Stathera IP Holdings Inc.
- Dual-output microelectromechanical resonator and method of manufacture and operation thereof15 Jun 2023US 2023/0183057 A1Stathera IP Holdings Inc.
Most cited
By later US patents
- Nano- and micro-electromechanical resonators275US 9,425,765 B2Northeastern University · 2016
- Method of manufacturing a mechanical resonating structure162US 9,762,202 B2Analog Devices, Inc. · 2017
- Contour-mode piezoelectric micromechanical resonators108US 7,492,241 B2The Regents of the University of California · 2009
- Tunable piezoelectric micro-mechanical resonator101US 6,943,484 B2University of Pittsburgh · 2005
- Contour-mode piezoelectric micromechanical resonators76US 7,791,432 B2The Regents of the University of California · 2010