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US 12,574,002 B2Granted
MEMS resonator
AssigneeKYOCERA Technologies Oy
InventorsAntti Jaakkola, Eric Sage, Aarne Oja
Life of this patent
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Abstract
A MEMS (microelectromechanical system) resonator assembly (100), comprising a support structure (102), a resonator element (101) suspended to the support structure (102), and an actuator for exciting the resonator element (101) to a resonance mode. The resonator element (101) vibrates at resonance frequency f0 and comprises at least one bulk acoustic resonator (110a, 110b). The ESR*A*f0 values of the resonator assembly (100) are in the range from 12 Ωmm2 MHz to 83 Ωmm2 MHZ.
Claims20
A MEMS resonator assembly, comprising
- a support structure,
- a resonator element suspended to the support structure, and
- an actuator for exciting the resonator element to a resonance mode
- wherein
- the resonator element vibrates at resonance frequency f0 and comprises at least one bulk acoustic resonator, and wherein
- ESR*A*f0 is in the range from 12 Ωmm2 MHz to 83 Ωmm2 MHz, where ESR is the equivalent series resistance of the MEMS resonator assembly and A is the area of the resonator element.
3 more elements
Dependencies are inferred from the claim text.