Dual-output microelectromechanical resonator and method of manufacture and operation thereof

A method for fabricating a resonating structure, the method comprising:

• providing a layer of base material;
• doping the layer of base material with a dopant having a given concentration;
• depositing, on top of the layer of base material, a layer of mismatch material having a mismatch in temperature coefficient of elasticity (TCE) relative to the base material, thereby forming a resonator body, wherein the given concentration of the dopant is chosen so as to minimize a second order temperature coefficient of frequency for the resonator body, and wherein a thickness of the layer of mismatch material is chosen so as to minimize a first order temperature coefficient of frequency for the resonator body;
• and
• anchoring the resonator body to a substrate via a tethering point that extends from a central vibration nodal point of the resonator body in an out-of-plane direction relative to the resonator body.