H03H 9/2405
Of microelectro-mechanical resonators
Official title: {of microelectro-mechanical resonators}
H03H9/2405 (Of microelectro-mechanical resonators) appears on 875 US grants and 885 published applications in this corpus.
Search patents in H03H- Granted patents
- 875
- Published applications
- 885
- Assignees
- 271
- Inventors
- 1,182
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 2 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 1 | 0 |
| 1992 | 1 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 3 | 0 |
| 1999 | 1 | 0 |
| 2000 | 1 | 0 |
| 2001 | 3 | 6 |
| 2002 | 10 | 14 |
| 2003 | 15 | 18 |
| 2004 | 15 | 20 |
| 2005 | 14 | 21 |
| 2006 | 15 | 31 |
| 2007 | 23 | 46 |
| 2008 | 24 | 32 |
| 2009 | 37 | 43 |
| 2010 | 38 | 56 |
| 2011 | 58 | 61 |
| 2012 | 41 | 50 |
| 2013 | 54 | 43 |
| 2014 | 63 | 46 |
| 2015 | 39 | 27 |
| 2016 | 46 | 39 |
| 2017 | 32 | 28 |
| 2018 | 33 | 44 |
| 2019 | 40 | 34 |
| 2020 | 52 | 50 |
| 2021 | 36 | 38 |
| 2022 | 35 | 30 |
| 2023 | 49 | 40 |
| 2024 | 37 | 23 |
| 2025 | 30 | 30 |
| 2026 | 25 | 15 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Resonance device and manufacturing method for the same6 Oct 2026US 12,756,371 B2Murata Manufacturing Co., Ltd.
- MEMS resonator22 Sep 2026US 12,744,514 B2KYOCERA Technologies Oy
- Temperature stable MEMS resonator8 Sep 2026US 12,732,155 B1SiTime Corporation
- Resonator electrode shields8 Sep 2026US 12,732,160 B1SiTime Corporation
- Three dimensional stacked microstructures for use in gyroscopes and other devices1 Sep 2026US 12,723,874 B2The Regents of the University of Michigan
- MEMS Resonator13 Aug 2026US 2026/0233990 A1SiTime Corporation
- Slanted resonator13 Aug 2026US 2026/0238179 A1KYOCERA Technologies Oy
- Tuning The Frequency-Temperature Response of MEMS Resonators Using Composite Eigenmodes23 Jul 2026US 2026/0213722 A1Stathera IP Holdings Inc.
- Mems apparatus for forming physical unclonable function key and operation method of mems apparatus28 May 2026US 2026/0147942 A1National Taiwan University
- Mems resonator with temperature compensation21 May 2026US 2026/0142640 A1Texas Instruments Incorporated
Most cited
By later US patents
- Laterally driven resonant microstructures419US 5,025,346 AThe Regents of the University of California · 1991
- Nano- and micro-electromechanical resonators275US 9,425,765 B2Northeastern University · 2016
- Resonator and a method of manufacturing the same, and oscillator and electronic apparatus including the same268US 8,264,291 B2Sony Corporation · 2012
- Pattern-aligned carbon nanotube growth and tunable resonator apparatus261US 6,803,840 B2California Institute of Technology · 2004
- Method of manufacturing a mechanical resonating structure162US 9,762,202 B2Analog Devices, Inc. · 2017