Resonance device and manufacturing method for the same

A resonance device comprising:

• a first substrate including a resonator having an upper electrode and a lower electrode;
• and
• a second substrate coupled to a side of the first substrate, the second substrate including:
• a semiconductor substrate,
• a first power supply terminal and a second power supply terminal on a side of the semiconductor substrate opposite to the first substrate, electrically connected to the upper electrode, and insulated from each other,
• a ground terminal on the side of the semiconductor substrate opposite to the first substrate and electrically connected to the lower electrode, and
• an insulating layer between the semiconductor substrate and the first power supply terminal and between the semiconductor substrate and the second power supply terminal,
• wherein, in a plan view of the second substrate, the insulating layer includes a central region spaced apart from an outer edge of the second substrate and a coupling region extends from the central region to the outer edge of the second substrate.