Resonator electrode shields
AssigneeSiTime Corporation
InventorsDavid Raymond Pedersen, Aaron Partridge, Thor Juneau
Life of this patent
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Abstract
A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure. The first drive electrode generates a time-varying electrostatic force that causes the resonant semiconductor structure to resonate mechanically, and the first sense electrode generates a timing signal in response to the mechanical resonance of the resonant semiconductor structure. The electrically conductive shielding structure is disposed between the first drive electrode and the first sense electrode to shield the first sense electrode from electric field lines emanating from the first drive electrode.
Claims20
An integrated circuit comprising:
- a first vibrating body of a MEMS resonator;
- a second vibrating body of a MEMS resonator;
- a first electrode to sense or drive motion of the first vibrating body;
- a second electrode to sense or drive motion of the second vibrating body;
- at least one conductive element configured so as to impede coupling between the first vibrating body and the second electrode;
- and
- at least one conductive element configured so as to impede coupling between the first electrode and the second vibrating body.
An integrated circuit comprising:
- a MEMS resonator having a first vibrating body and a second vibrating body;
- a first electrode to sense or drive motion of the first vibrating body;
- a second electrode to sense or drive motion of the second vibrating body;
- at least one conductive element configured so as to impede coupling between the first vibrating body and the second electrode;
- and
- at least one conductive element configured so as to impede coupling between the first electrode and the second vibrating body.
A method of fabricating an integrated circuit, the method comprising:
- fabricating a first vibrating body of a MEMS resonator;
- fabricating a second vibrating body of a MEMS resonator;
- fabricating a first electrode which is configured to sense or drive motion, during operation of the integrated circuit, of the first vibrating body;
- fabricating a second electrode to sense or drive motion, during operation of the integrated circuit, of the second vibrating body;
- fabricating at least one conductive element configured so as to impede coupling between the first vibrating body and the second electrode;
- and
- fabricating at least one conductive element configured so as to impede coupling between the first electrode and the second vibrating body.
Dependencies are inferred from the claim text.