Three dimensional stacked microstructures for use in gyroscopes and other devices

A stacked resonator structure, comprising:

• a support substrate;
• an inner electrode shell having a hollow hemispherical shape with an inner concave surface facing the support substrate;
• an electrode support post integral with the inner electrode shell and extending from a center of the inner concave surface to the support substrate;
• a resonator having a hollow hemispherical shape with an inner concave surface conformed with the inner electrode shell and is configured to resonate;
• a resonator support post integral with the resonator and extending from a center of the inner concave surface of the resonator towards the support substrate;
• and
• a conductive material deposited on the inner concave surface of the resonator facing the inner electrode shell, where the inner electrode shell is nested in the resonator, and the inner electrode shell is configured to drive the resonator electrostatically.

A stacked resonator assembly, comprising:

• a support substrate;
• a first resonator structure attached to the support substrate, wherein the first resonator structure includes
• a first resonator having a hollow hemispherical shape with an inner concave surface facing the support substrate;
• a support post integral with the first resonator and extending from a center of the inner concave surface to the support substrate;
• and
• a first electrode shell having a hollow hemispherical shape with an inner concave surface conformed with the first resonator, where the first resonator is nested in the first electrode shell and the first electrode shell is configured to drive the first resonator electrostatically;
• and
• a second resonator structure attached to the support substrate, where the second resonator structure includes
• a second resonator having a hollow hemispherical shape with an inner concave surface facing the support substrate;
• a support post integral with the second resonator and extending from a center of the inner concave surface to the support substrate;
• and
• a second electrode shell having a hollow hemispherical shape with an inner concave surface conformed with the second resonator, where the second resonator is nested in the second electrode shell and the second electrode shell is configured to drive the second resonator electrostatically;
• wherein the inner concave surface of the first resonator is facing the inner concave surface of the second resonator.