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US 9,425,765 B2Granted
Nano- and micro-electromechanical resonators
AssigneeNortheastern University
InventorsMatteo Rinaldi, Zhenyun Qian, Yu Hui
Life of this patent
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Abstract
A resonator including a piezoelectric plate and an interdigital electrode is provided. A ratio between a thickness of the plate and a pitch of the interdigital electrode may be from about 0.5 to about 1.5. A radiation detector including a resonator and an absorber layer capable of absorbing at least one of infrared and terahertz radiation is provided. A resonator including a piezoelectric plate and a two-dimensional electrically conductive material is provided.
Claims7
A resonator comprising:
- a piezoelectric plate, and
- a first interdigital electrode including a plurality of conductive strips disposed on a first surface of the piezoelectric plate, wherein the plurality of conductive strips are arranged with a pitch;
- wherein a ratio between a thickness of the piezoelectric plate and the pitch of the first interdigital electrode is from about 0.5 to about 1.5.
Dependencies are inferred from the claim text.