Method of manufacturing a mechanical resonating structure
AssigneeAnalog Devices, Inc.
InventorsFlorian Thalmayr, Jan H. Kuypers, Klaus Juergen Schoepf
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Abstract
Methods are described for constructing a mechanical resonating structure by applying an active layer on a surface of a compensating structure. The compensating structure comprises one or more materials having an adaptive resistance to deform that reduces a variance in a resonating frequency of the mechanical resonating structure, wherein at least the active layer and the compensating structure form a mechanical resonating structure having a plurality of layers of materials A thickness of each of the plurality of layers of materials results in a plurality of thickness ratios therebetween.
Claims13
A method of fabricating a mechanical resonating structure characterized by a resonance frequency (f0) and a zero temperature coefficient of frequency (T0), the method comprising:
- applying an active layer on a compensating structure, wherein the compensating structure comprises one or more materials having an adaptive stiffness that reduces variation of the resonance frequency (f0);
- applying a sacrificial layer on a surface of the active layer such that a portion of the active layer and a portion of the sacrificial layer are exposed, the sacrificial layer being a material different than the active layer;
- and
- subsequent to applying the sacrificial layer, adjusting a thickness of the portion of the sacrificial layer to tune a value of f0 and a value of T0.
A method of fabricating a mechanical resonating structure characterized by a resonance frequency (f0) and a zero temperature coefficient of frequency (T0), the method comprising:
- obtaining a mechanical resonating structure comprising an active layer and a compensating structure, wherein the compensating structure comprises one or more materials having an adaptive stiffness that reduces variation of the resonance frequency (f0);
- patterning a trimming layer on the active layer;
- and
- adjusting a thickness of the trimming layer to selectively tune a value of f0 and a value of T0.
Dependencies are inferred from the claim text.