MEMS resonator
AssigneeKYOCERA Technologies Oy
InventorsEric Sage, Aarne Oja, Hannu Vesterinen
Life of this patent
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Abstract
A MEMS (microelectromechanical system) resonator assembly (100), comprising a support structure (102), a resonator element (101) suspended to the support structure (102), and an actuator for exciting the resonator element (101) to a resonance mode. The resonator element (101) comprises two bulk acoustic resonators (110a, 110b) and a flexural mode resonator (120). The flexural mode resonator (120) mechanically connects the two bulk acoustic resonators (110a, 110b), and the MEMS resonator assembly (100) is configured to vibrate in a collective resonance mode in which motions of the two bulk acoustic resonators (110a, 110b) are substantially in the same or 180 degrees shifted phase with respect to each other.
Claims19
A microelectromechanical system, MEMS, resonator assembly, comprising
- a support structure;
- a resonator element suspended to the support structure;
- and
- an actuator for exciting the resonator element to a resonance mode, wherein the resonator element comprises two bulk acoustic resonators and a flexural mode resonator, the said flexural mode resonator mechanically connects the two bulk acoustic resonators, and the MEMS resonator assembly is configured to vibrate in a collective resonance mode in which motions of the two bulk acoustic resonators are substantially in the same or 180 degrees shifted phase with respect to each other, wherein a distance between the two bulk acoustic resonators is 50 μm or less.
Dependencies are inferred from the claim text.