Mems resonator
AssigneeKYOCERA Technologies Oy
InventorsEric SAGE, Aarne OJA, Hannu VESTERINEN
Life of this patent
Estimating the term…
Abstract
A MEMS (microelectromechanical system) resonator assembly (100), comprising a support structure (102), a resonator element (101) suspended to the support structure (102), and an actuator for exciting the resonator element (101) to a resonance mode. The resonator element (101) comprises two bulk acoustic resonators (110a, 110b) and a flexural mode resonator (120). The flexural mode resonator (120) mechanically connects the two bulk acoustic resonators (110a, 110b), and the MEMS resonator assembly (100) is configured to vibrate in a collective resonance mode in which motions of the two bulk acoustic resonators (110a, 110b) are substantially in the same or 180 degrees shifted phase with respect to each other.
Claims25
A MEMS (microelectromechanical system) resonator assembly, comprising
- a support structure;
- a resonator element suspended to the support structure;
- and
- an actuator for exciting the resonator element to a resonance mode, wherein
- the resonator element comprises two bulk acoustic resonators and a flexural mode resonator, the said flexural mode resonator mechanically connects the two bulk acoustic resonators, and the MEMS resonator assembly is configured to vibrate in a collective resonance mode in which motions of the two bulk acoustic resonators are substantially in the same or 180 degrees shifted phase with respect to each other.
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
Dependencies are inferred from the claim text.