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US 12,338,119 B2Granted
Dual-output microelectromechanical resonator and method of manufacture and operation thereof
AssigneeStathera IP Holdings Inc.
InventorsGeorge Xereas, Vahid Tayari, Ahmed Khorshid, Charles Allan
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Abstract
An example resonating structure comprises a substrate, a resonator body, and an anchoring body for anchoring the resonator body to the substrate. The resonator body is doped with a dopant having a concentration chosen so as to minimize a second order temperature coefficient of frequency for the resonator body. The resonator body is operable in an in-plane mode of vibration and an out-of-plane mode of vibration.
Claims20
A resonating structure comprising:
- a substrate;
- a resonator body, wherein the resonator body is doped with a dopant having a concentration chosen so as to minimize a second order temperature coefficient of frequency for the resonator body, and wherein the resonator body is operable in an in-plane mode of vibration and an out-of-plane mode of vibration;
- and
- an anchoring body for anchoring the resonator body to the substrate.
1 more element
A method for fabricating a resonating structure, the method comprising:
- providing a resonator body;
- doping the resonator body with a dopant having a given concentration chosen so as to minimize a second order temperature coefficient of frequency for the resonator body, wherein the resonator body is operable in an in-plane mode of vibration and an out-of-plane mode of vibration;
- and
- anchoring the resonator body to a substrate.
1 more element
Dependencies are inferred from the claim text.