H01J 37/3485
Means for avoiding target poisoning
Official title: {Means for avoiding target poisoning}
H01J37/3485 (Means for avoiding target poisoning) appears on 11 US grants and 18 published applications in this corpus.
Search patents in H01J- Granted patents
- 11
- Published applications
- 18
- Assignees
- 12
- Inventors
- 41
- Latest grant
- 17 Jun 2025
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| 2025 | 1 | 1 |
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Recent patents
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- Sputtering method11 Feb 2021US 2021/0040605 A1Beijing Naura Microelectronics Equipment Co., Ltd.
- Methods and apparatus for co-sputtering multiple targets9 Jan 2020US 2020/0013597 A1APPLIED Materials.Inc.
Most cited
By later US patents