Substrate holding apparatus, mask alignment method, and vacuum processing apparatus using long taper pins and short taper pins for alignment

A substrate holding apparatus comprising:

• a substrate holder capable of holding a substrate;
• a mask to be located on the substrate holder with the substrate interposed therebetween;
• a first engaging portion which is formed on any one of the substrate holder and the mask and which has two protruding portions, wherein the two protruding portions of the first engaging portion are arranged along a first direction;
• a second engaging portion which is formed on the any one of the substrate holder and the mask and which has two discrete protruding portions, wherein a length of a part that protrudes from the any one of the substrate holder and the mask, of the two discrete protruding portions of the second engaging portion, is shorter than each of a length of a part that protrudes from the any one of the substrate holder and the mask, of the two protruding portions of the first engaging portion, wherein the two discrete protruding portions of the second engaging portion are arranged along a second direction that is perpendicular to the first direction, the first and second directions being in a same plane;
• first groove portions formed in the other one of the substrate holder and the mask to engage with the two protruding portions of the first engaging portion;
• and
• second groove portions formed in the other one of the substrate holder and the mask to engage with the two discrete protruding portions of the second engaging portion.

A substrate holding apparatus comprising:

• a substrate holder capable of holding a substrate;
• a mask to be located on the substrate holder with the substrate interposed therebetween;
• a first engaging portion which is formed on any one of the substrate holder and the mask and which has two protruding portions, wherein the two protruding portions of the first engaging portion are arranged along a first direction;
• a second engaging portion which is formed on the any one of the substrate holder and the mask and which has two discrete protruding portions, wherein a length of a part that protrudes from the any one of the substrate holder and the mask, of the two discrete protruding portions of the second engaging portion, is shorter than each of a length of a part that protrudes from the any one of the substrate holder and the mask, of the two protruding portions of the first engaging portion, wherein the two discrete protruding portions of the second engaging portion are arranged along a second direction that is perpendicular to the first direction, the first and second directions being in a same plane;
• first groove portions formed in the other one of the substrate holder and the mask to engage with the two protruding portions of the first engaging portion;
• and
• second groove portions formed in the other one of the substrate holder and the mask to engage with the two discrete protruding portions of the second engaging portion,
• wherein the two protruding portions of the first engaging portion have first tapered surfaces respectively formed at one end thereof, and the other ends of the two protruding portions of the first engaging portion are connected to any one of the substrate holder and the mask,
• the two discrete protruding portions of the second engaging portion have a second tapered surface formed at one end thereof, and the other ends of the two discrete protruding portions of the second engaging portion are connected to the any one of the substrate holder and the mask, and
• a region in which the two first tapered surfaces of the first engaging portion are formed and a region in which the second tapered surface of the second engaging portion is formed do not overlap with each other in a direction in which the substrate holder and the mask are engaged with each other.