Methods and apparatus for co-sputtering multiple targets
AssigneeApplied Materials, Inc.
InventorsAnantha K. Subramani, Hanbing Wu, Wei W. Wang, Ashish Goel, Srinivas Guggilla, Lavinia Nistor
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Abstract
Embodiments of a method and apparatus for co-sputtering multiple target materials are provided herein. In some embodiments, a process chamber including a substrate support to support a substrate; a plurality of cathodes coupled to a carrier and having a corresponding plurality of targets to be sputtered onto the substrate; and a process shield coupled to the carrier and extending between adjacent pairs of the plurality of targets.
Claims20
An apparatus for a process chamber with a plurality of targets, comprising:
- a process shield configured to be coupled to a carrier coupled to the plurality of targets, wherein the process shield is configured to extend between adjacent pairs of the plurality of targets and to move vertically and rotate with respect to the plurality of targets.
An apparatus for a process chamber with a plurality of targets, comprising:
- a shield configured to be coupled to a carrier coupled to the plurality of targets, to extend between adjacent pairs of the plurality of targets, to move vertically and rotate with respect to the plurality of targets, and to expose the plurality of targets through the shield;
- and
- a plurality of shrouds which are configured to surround a corresponding one of the plurality of targets.
An apparatus for a process chamber with a plurality of targets, comprising:
- a shield configured to be coupled to a carrier coupled to the plurality of targets, to extend between adjacent pairs of the plurality of targets, to move vertically and rotate with respect to the plurality of targets, and to expose the plurality of targets through the shield;
- and
- a plurality of shrouds which are configured to surround a corresponding one of the plurality of targets and to extend downward towards a substrate support of the process chamber, and wherein the plurality of shrouds have a height of approximately 5 inches to approximately 6 inches, and
- wherein the shield is configured to move vertically with respect to the plurality of targets before rotating.
Dependencies are inferred from the claim text.