H01J 37/32944
Arc detection
Official title: {Arc detection}
H01J37/32944 (Arc detection) appears on 87 US grants and 115 published applications in this corpus.
Search patents in H01J- Granted patents
- 87
- Published applications
- 115
- Assignees
- 39
- Inventors
- 281
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2004 | 1 | 0 |
| 2005 | 0 | 0 |
| 2006 | 0 | 0 |
| 2007 | 0 | 0 |
| 2008 | 0 | 3 |
| 2009 | 0 | 1 |
| 2010 | 2 | 5 |
| 2011 | 1 | 0 |
| 2012 | 0 | 3 |
| 2013 | 2 | 7 |
| 2014 | 2 | 5 |
| 2015 | 4 | 5 |
| 2016 | 7 | 9 |
| 2017 | 5 | 11 |
| 2018 | 7 | 5 |
| 2019 | 13 | 4 |
| 2020 | 9 | 4 |
| 2021 | 4 | 10 |
| 2022 | 4 | 9 |
| 2023 | 5 | 9 |
| 2024 | 12 | 12 |
| 2025 | 6 | 11 |
| 2026 | 3 | 2 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Arc current reduction from an electrostatic chuck6 Oct 2026US 12,757,680 B2APPLIED Materials.Inc.
- Semiconductor process device having an optical system on a window23 Jun 2026US 12,666,904 B2Samsung Electronics Co., Ltd.
- Plasma generating apparatus31 Mar 2026US 12,592,365 B2
- RF power generator with analogue and digital detectors23 Sep 2025US 12,424,425 B2Comet AG
- Deposition apparatus24 Jun 2025US 12,338,526 B2Canon Anelva Corporation
- Methods and systems for arc suppression during semiconductor fabrication processes20 Aug 2026US 2026/0245845 A1APPLIED Materials.Inc.
- Arc Analysis Based On Multiple Engineered Arc Detection Sources And State Data16 Jul 2026US 2026/0204527 A1MKS Inc.
- Metal-oxide varistor (mov) based surge protection circuit for plasma processing chamber11 Dec 2025US 2025/0379032 A1Lam Research Corporation
- System and method for detecting and inhibiting arcing in semiconductor plasma generation systems9 Oct 2025US 2025/0316467 A1
- Systems and methods for arc detection and handling using impedance data18 Sep 2025US 2025/0294663 A1Advanced Energy Industries, Inc.
Most cited
By later US patents
- Method and apparatus for controlling ion energy distribution115US 9,287,092 B2Advanced Energy Industries, Inc. · 2016
- Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system105US 9,685,297 B2Advanced Energy Industries, Inc. · 2017
- Harmonic derived arc detector92US 7,728,602 B2MKS Instruments, Inc. · 2010
- Current threshold response mode for arc management69US 10,217,618 B2Advanced Energy Industries, Inc. · 2019
- Harmonic derived arc detector57US 8,890,537 B2MKS Instruments, Inc. · 2014