Methods and systems for arc suppression during semiconductor fabrication processes

A system, comprising:

• a memory configured to store computer-executable instructions;
• and
• one or more processors in communication with the memory and configured to access the memory and execute the computer-executable instructions to:
• deliver radio-frequency (RF) power to a plasma in a semiconductor processing chamber, wherein the semiconductor processing chamber is configured to perform a plasma-based semiconductor process;
• detect a first indication of a first arc event in the semiconductor processing chamber;
• and
• in response to detecting the first indication of the first arc event, pulse the RF power to the plasma, wherein pulsing the RF power to the plasma comprises:
• repeatedly pulsing the RF power on and off to suppress the first arc event.

One or more non-transitory computer-readable media comprising computer-executable instructions that, when executed by one or more processors of a computer system, cause the one or more processors to perform operations comprising:

• causing radio-frequency (RF) power to be delivered to a plasma in a semiconductor processing chamber, wherein the semiconductor processing chamber is configured to perform a plasma-based semiconductor process;
• detecting a first indication of a first arc event in the semiconductor processing chamber;
• and
• in response to detecting the first indication of the first arc event, causing the RF power to the plasma to pulse, wherein causing the RF power to the plasma to pulse comprises:
• repeatedly causing the RF power to pulse on and off to suppress the first arc event.