Plasma generating apparatus
AssigneePeter Choi
InventorPeter Choi
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AssigneePeter Choi
InventorPeter Choi
Estimating the term…
Apparatus for generating a plasma via the transient hollow cathode discharge effect is disclosed. The apparatus comprises a chamber comprising an inlet through which gas may enter the chamber and an outlet through which the gas may exit the chamber, a cathode electrode disposed in the chamber, the cathode electrode comprising a plurality of hollow cathodes, an anode electrode spaced apart from the cathode, a power supply, and a power supply controller configured to reduce a power level of the electrical power below a level required to maintain the plasma at the plurality of hollow cathodes, after electrical breakdown has occurred. Each hollow cathode comprises a through-thickness hole through which the gas may pass from one side of the cathode electrode to another side of the cathode electrode. A modular apparatus is also disclosed, comprising a plurality of plasma reactor modules arranged in series and/or in parallel.
Apparatus for generating a plasma via the transient hollow cathode discharge effect, the apparatus comprising:
Dependencies are inferred from the claim text.