Arc Analysis Based On Multiple Engineered Arc Detection Sources And State Data
AssigneeMKS Inc.
InventorsAaron SWENSON, Deyasini MAJUMDAR, Jesse KLEIN, Peter PAUL, Aaron RADOMSKI, Aaron BURRY, Vladimir KOZITSKY, Jonathan SMYKA
Life of this patent
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Abstract
A controller for an arc detection system includes at least one arc detector module configured to output at least one arc detection signal in a plasma processing system. An arc analysis module is configured to receive the at least one arc detection signal, to determine if at least one arc is present in the plasma processing system based on the at least one arc detection signal, and to generate an arc mitigation signal in accordance with the at least one arc.
Claims20
A controller for an arc detection system comprising:
- at least one arc detector module configured to output at least one arc detection signal in a plasma processing system;
- and
- an arc analysis module configured to receive the at least one arc detection signal, to determine if at least one arc is present in the plasma processing system based on the at least one arc detection signal, and to generate an arc mitigation signal in accordance with the at least one arc.
A non-transitory computer-readable medium storing instructions, the instructions comprising:
- obtaining at least one arc detection signal in a plasma processing system;
- and
- receiving the at least one arc detection signal, determining if at least one arc is present in the plasma processing system based on the at least one arc detection signal, and generating an arc mitigation signal in accordance with the at least one arc.
Dependencies are inferred from the claim text.