Semiconductor process device having an optical system on a window

A semiconductor process device, comprising:

• a chamber housing comprising a first window on a first surface of a first wall of the chamber housing and a second window on a second surface of a second wall of the chamber housing, wherein the first surface is transverse to the second surface;
• a plurality of first optical pickup units mounted on the first window and configured to detect a first optical signal from an internal region of the chamber housing through the first window;
• a plurality of second optical pickup units mounted on the second window and configured to detect a second optical signal from the internal region of the chamber housing through the second window;
• a sensor comprising a plurality of first photodetectors configured to output a first voltage signal in response to the first optical signal and a plurality of second photodetectors configured to output a second voltage signal in response to the second optical signal;
• and
• a processor configured to, when it is determined that an arc has occurred in the internal region of the chamber housing, generate a spatial image of the internal region of the chamber housing using the first voltage signal and the second voltage signal.

A semiconductor process device, comprising:

• a chamber housing comprising first and second walls;
• a first window on a surface of the first wall, wherein the first window provides optical access through the first wall into an internal region of the chamber housing;
• a second window on a surface of the second wall, wherein the second window provides optical access through the second wall into the internal region of the chamber housing;
• a first optical system on the first window and having a first field of view;
• a plurality of first optical pickup units configured to receive an optical signal from the internal region of the chamber housing through the first optical system;
• a second optical system on the second window and having a second field of view;
• a plurality of second optical pickup units configured to receive an optical signal from the internal region of the chamber housing through the second optical system;
• and
• a processor configured to, when it is determined that an arc has occurred in the internal region of the chamber housing, generate an image for the internal region of the chamber housing using the optical signal received by the plurality of first optical pickup units and the optical signal received by the plurality of second optical pickup units.