H01J 37/32311
Circuits specially adapted for controlling the microwave discharge
Official title: {Circuits specially adapted for controlling the microwave discharge}
H01J37/32311 (Circuits specially adapted for controlling the microwave discharge) appears on 110 US grants and 136 published applications in this corpus.
Search patents in H01J- Granted patents
- 110
- Published applications
- 136
- Assignees
- 46
- Inventors
- 272
- Latest grant
- 30 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 0 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 1 | 0 |
| 2001 | 1 | 0 |
| 2002 | 1 | 0 |
| 2003 | 2 | 0 |
| 2004 | 3 | 2 |
| 2005 | 1 | 1 |
| 2006 | 1 | 2 |
| 2007 | 0 | 2 |
| 2008 | 0 | 0 |
| 2009 | 1 | 2 |
| 2010 | 2 | 0 |
| 2011 | 1 | 0 |
| 2012 | 0 | 1 |
| 2013 | 0 | 2 |
| 2014 | 0 | 3 |
| 2015 | 5 | 11 |
| 2016 | 5 | 10 |
| 2017 | 9 | 12 |
| 2018 | 8 | 9 |
| 2019 | 5 | 15 |
| 2020 | 14 | 8 |
| 2021 | 8 | 12 |
| 2022 | 8 | 11 |
| 2023 | 8 | 9 |
| 2024 | 11 | 5 |
| 2025 | 4 | 8 |
| 2026 | 8 | 11 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
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Most cited
By later US patents
- Electromagnetic-radiation power-supply mechanism for exciting a coaxial waveguide by using first and second poles and a ring-shaped reflection portion183US 9,072,158 B2Tokyo Electron Limited · 2015
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- Radial waveguide systems and methods for post-match control of microwaves111US 9,837,249 B2APPLIED Materials.Inc. · 2017