Modular microwave plasma source
AssigneeApplied Materials, Inc.
InventorsPhilip Allan Kraus, Thai Cheng Chua
Life of this patent
Estimating the term…
Abstract
Embodiments include a modular microwave source. In an embodiment, the modular microwave source comprises a voltage control circuit, a voltage controlled oscillator, where an output voltage from the voltage control circuit drives oscillation in the voltage controlled oscillator. The modular microwave source may also include a solid state microwave amplification module coupled to the voltage controlled oscillator. In an embodiment, the solid state microwave amplification module amplifies an output from the voltage controlled oscillator. The modular microwave source may also include an applicator coupled to the solid state microwave amplification module, where the applicator is a dielectric resonator.
Claims14
A plasma processing tool, comprising:
- a processing chamber;
- a dielectric lid for sealing the chamber;
- an array of applicators arranged across an outer surface of the dielectric chamber lid, wherein each applicator is coupled to a different microwave amplification module;
- and
- a plurality of sensors within the chamber and attached to the dielectric lid, wherein the sensors are communicatively coupled to the microwave amplification modules to provide feedback control for the plasma processing tool, wherein each one of the plurality of sensors is laterally surrounded by and is directly adjacent to three or more applicators of the array of applicators from a plan view perspective, and wherein one or more individual ones of the array of applicators is laterally surrounded by and is directly adjacent to three sensors of the plurality of sensors from the plan view perspective.
A semiconductor processing tool, comprising:
- a chamber, wherein the chamber comprises a plurality of processing zones;
- a voltage control circuit;
- a voltage controlled oscillator, wherein an output voltage from the voltage control circuit drives oscillation in the voltage controlled oscillator;
- a plurality of modular microwave sources coupled to one or more of the processing zones, wherein each modular microwave source comprises:
- a solid state microwave amplification module coupled to the voltage controlled oscillator, wherein the solid state microwave amplification module amplifies an output from the voltage controlled oscillator;
- and
- an applicator coupled to the solid state microwave amplification module, wherein the applicator is a dielectric resonator;
- and
- a plurality of sensors positioned among the applicators, wherein each one of the plurality of sensors is laterally surrounded by and is directly adjacent to three or more applicators of the array of applicators from a plan view perspective, and wherein one or more individual ones of the array of applicators is laterally surrounded by and is directly adjacent to three sensors of the plurality of sensors from the plan view perspective.
Dependencies are inferred from the claim text.