Modular high-frequency source
AssigneeApplied Materials, Inc.
InventorsThai Cheng Chua, Christian Amormino, Hanh Nguyen, Kallol Bera, Philip Allan Kraus
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Abstract
Embodiments include a modular high-frequency emission source. In an embodiment, the modular high-frequency emission source includes a plurality of high-frequency emission modules, where each high-frequency emission module comprises and oscillator module, an amplification module, and an applicator. In an embodiment the oscillator module comprises a voltage control circuit and a voltage controlled oscillator. In an embodiment, the amplification module is coupled to the oscillator module. In an embodiment, the applicator is coupled to the amplification module. In an embodiment, each high-frequency emission module includes a different oscillator module.
Claims20
A modular high-frequency emission source, comprising:
- an array of circular applicators over a plurality of wafer processing regions, the array having a plurality of zones each having a same total area, wherein a first zone has a first number of circular applicators, and a second zone has a second number of circular applicators, the second number of circular applicators different than the first number of circular applicators, wherein there are no applicators over one or more of the plurality of wafer processing regions.
A processing tool, comprising:
- a processing chamber;
- and
- a modular high-frequency emission source, comprising:
- a plurality of oscillator modules;
- a plurality of amplification modules;
- and
- an array of circular applicators over a plurality of wafer processing regions, the array having a plurality of zones each having a same total area, wherein a first zone has a first number of circular applicators, and a second zone has a second number of circular applicators, the second number of circular applicators different than the first number of circular applicators, wherein there are no applicators over one or more of the plurality of wafer processing regions.
Dependencies are inferred from the claim text.