Electromagnetic-radiation power-supply mechanism for exciting a coaxial waveguide by using first and second poles and a ring-shaped reflection portion
AssigneeTokyo Electron Limited
InventorsTaro Ikeda, Yuki Osada, Shigeru Kasai
Life of this patent
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Abstract
An electromagnetic-radiation power-supply mechanism includes a microwave power introduction port provided on the side of the coaxial waveguide, a power line being connected to the microwave power introduction port; and a power supply antenna for radiating the electromagnetic wave power into the waveguide, the power supply antenna being connected to the power line. The power supply antenna includes an antenna body having a first pole connected to the power line and a second pole connected to an inner conductor of the waveguide; and a ring-shaped reflection portion extending from opposite sides of the antenna body.
Claims9
An electromagnetic-radiation power-supply mechanism for supplying an electromagnetic wave power to a coaxial waveguide, the mechanism comprising:
- a microwave power introduction port provided on a side of the coaxial waveguide, a power line being connected to the microwave power introduction port;
- and
- a power supply antenna for radiating the electromagnetic wave power into the waveguide, the power supply antenna being connected to the power line,
- wherein the power supply antenna includes:
- an antenna body having a first pole connected to the power line and a second pole connected to an inner conductor of the waveguide;
- and a ring-shaped reflection portion extending from opposite sides of the antenna body along an outer side of the inner conductor, and
- a first electromagnetic wave that is incident on the antenna body and a second electromagnetic wave reflected by the reflection portion to form a standing wave, and the electromagnetic wave power propagates in the waveguide by chain reactions of an induced electric field and an induced magnetic field caused by the standing wave.
A microwave introduction mechanism used for a surface wave plasma source for generating a surface wave plasma in a chamber, the mechanism comprising:
- a coaxial waveguide;
- a power introduction port provided on a side of the coaxial waveguide, a coaxial line being connected to the power introduction port;
- a power supply antenna for radiating an electromagnetic wave power into the waveguide, the power supply antenna being connected to an inner conductor of the coaxial line;
- and
- an antenna unit having a microwave radiation antenna for radiating a microwave supplied to the waveguide into the chamber,
- wherein the power supply antenna includes:
- an antenna body having a first pole connected to the coaxial line and a second pole which contacts an inner conductor of the waveguide;
- and a reflection portion formed in a ring shape and extending from opposite sides of the antenna body along an outer side of the inner conductor, and
- a first electromagnetic wave that is incident on the antenna main body and a second electromagnetic wave reflected by the reflection portion to form a standing wave, and the electromagnetic wave power propagates in the waveguide by chain reactions of an induced electric field and an induced magnetic field caused by the standing wave.
Dependencies are inferred from the claim text.