H01J 37/226
Optical arrangements for illuminating the object
Official title: {Optical arrangements for illuminating the object; optical arrangements for collecting light from the object}
H01J37/226 (Optical arrangements for illuminating the object) appears on 385 US grants and 414 published applications in this corpus.
Search patents in H01J- Granted patents
- 385
- Published applications
- 414
- Assignees
- 151
- Inventors
- 915
- Latest grant
- 29 Sep 2026
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| Year | Granted patents | Published applications |
|---|---|---|
| 1981 | 1 | 0 |
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| 1986 | 0 | 0 |
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| 2002 | 6 | 7 |
| 2003 | 6 | 6 |
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| 2005 | 7 | 4 |
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| 2019 | 18 | 33 |
| 2020 | 27 | 28 |
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| 2022 | 27 | 31 |
| 2023 | 22 | 29 |
| 2024 | 13 | 26 |
| 2025 | 25 | 29 |
| 2026 | 19 | 17 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Discharging a region of a sample29 Sep 2026US 12,749,648 B2Applied Materials Israel Ltd.
- Laser thermal epitaxy in a charged particle microscope15 Sep 2026US 12,738,446 B2FEI Company
- Laser-based contrast control in transmission electron microscopy15 Sep 2026US 12,738,449 B2Yeda Research and Development Co. Ltd.
- Sample piece relocating device1 Sep 2026US 12,725,755 B2Hitachi High-Tech Analysis Corporation
- Fiber Fabry-Perot Cavity laser phase plate for charged particle microscopy1 Sep 2026US 12,725,756 B2FEI Company
- Adaptive illumination for a dual beam system10 Sep 2026US 2026/0269178 A1FEI Company
- Inspection System3 Sep 2026US 2026/0260841 A1Hitachi High-Tech Corporation
- Analyzer and Analysis Method27 Aug 2026US 2026/0251596 A1JEOL Ltd.
- System for the continuous-wave laser processing and sem characterisation of a sample20 Aug 2026US 2026/0245827 A1
- Charged-Particle Beam Device13 Aug 2026US 2026/0237593 A1Hitachi High-Tech Corporation
Most cited
By later US patents
- Automatic focusing system for scanning electron microscope equipped with laser defect detection function103US 6,621,082 B2Seiko Instruments Inc. · 2003
- Multilayered device micro etching method and system96US 5,055,696 AHitachi, Ltd. · 1991
- High Resolution analytical probe station88US 6,198,299 B1The Micromanipulator Company, Inc. · 2001
- Process for controlling the strike positions of a plurality of electron beams on a melting bath77US 4,988,844 ALeybold Aktiengesellschaft · 1991
- Method for making specimen and apparatus thereof77US 5,656,811 AHitachi, Ltd. · 1997