Charged-Particle Beam Device
AssigneeHitachi High-Tech Corporation
InventorDaisuke HIRANO
Life of this patent
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Abstract
The purpose of the present invention is to provide a charged-particle beam device capable of quickly identifying a defect position in an observed image of a sample to improve inspection throughput. The charged-particle beam device according to the present invention comprises a database describing such combinations of wavelengths and polarization directions of light that the contrast in an observed image of a defect that a sample has can be enhanced, wherein: the sample is irradiated with the light using at least one of the combinations; the observed image is generated for each of the combinations; and the defect is detected using the observed image (see FIG. 7).
Claims13
A charged-particle beam device for emitting a charged particle beam to a sample, the device comprising:
- a charged particle source configured to emit primary charged particles to the sample;
- a light source configured to emit light to irradiate the sample;
- a detector configured to detect secondary charged particles generated from the sample by emitting the primary charged particles to the sample;
- a computer configured to generate an observation image of the sample using the secondary charged particles detected by the detector;
- a light control unit configured to control a light parameter representing a physical property of the light;
- and
- a database configured to describe combinations of a wavelength of the light and a polarization direction of the light, which enhance contrast of the observation image of a defect in the sample, wherein
- the light control unit emits the light to the sample using at least one of the combinations,
- the computer generates the observation image for each of the combinations used by the light control unit, and
- the computer detects the defect using the observation image.
Dependencies are inferred from the claim text.