High Resolution analytical probe station

A probe station system for acquiring electrical test signals from an integrated circuit specimen, comprising:

• a scanning electron microscope positioned for observing a surface of the specimen exposing electrically conductive terminals on the specimen;
• a carrier for supporting the specimen in relation to said scanning electron microscope;
• a computer for acquiring an image identifying conductive path indicia of the surface of the specimen from said scanning electron microscope;
• a motorized manipulator being remotely controlled by said computer;
• a plurality of probes for conveying electrical test signals positionable on the surface of the specimen with said motorized manipulator;
• a vacuum chamber having an inner enclosure for housing said scanning electron microscope, said carrier, said motorized manipulator and said plurality of probes for analyzing said specimen in a vacuum;
• and
• a feedthrough on said vacuum chamber for coupling electrical signals from said computer to said motorized manipulator and said plurality of probes, said computer communicating with said motorized manipulator for positioning said plurality of probes for applying and receiving electrical test signals via the terminals on the specimen using the image acquired with said computer to identify the electrically conductive terminals from the conductive path indicia of the surface of the specimen observed with said scanning electron microscope.

A method of analyzing an integrated circuit specimen, comprising the steps of:

• positioning a scanning electron microscope for observing a surface of the specimen exposing electrically conductive terminals on the specimen;
• supporting the specimen in relation to the scanning electron microscope;
• acquiring an image identifying conductive path indicia of the surface of the specimen from the scanning electron microscope;
• remotely controlling a plurality of probes positionable on the surface of the specimen for conveying electrical test signals;
• generating a vacuum in a chamber having an inner enclosure for housing the scanning electron microscope and the plurality of probes for analyzing the specimen in a vacuum;
• and
• coupling communication signals via a feedthrough on the chamber for applying electrical test signals to the terminals on the specimen using the image acquiring step to identify the electrically conductive terminals from the conductive path indicia of the surface of the specimen observed with the scanning electron microscope for positioning the plurality of probes with the step for remotely controlling the plurality of probes.