Laser-based contrast control in transmission electron microscopy
AssigneeYeda Research and Development Co. Ltd.
InventorsOsip Schwartz, Michael Kali
Life of this patent
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Abstract
A system and methods for electron beam imaging or electron beam spectroscopy. The system comprising: a transmission electron microscope (TEM) having a back focal plane; one or more laser-based devices, configured to shift a predetermined portion of an electron wave to an energy that is different from the energy originally provided by the electron source of the TEM; and an electron energy filter that is configured to accept electron waves, at the energy provided by the electron source of the TEM, and further configured to reject electron waves shifted to a different energy by the laser device.
Claims20
A system for electron beam imaging or for electron beam spectroscopy comprising:
- a transmission electron microscope (TEM), comprising an electron source configured to provide an electron beam;
- at least one laser-based device configured to provide at least one laser beam, wherein the laser beam is configured to shift a predetermined portion of the electron beam to an energy spectrum that is different from the energy spectrum originally provided by the electron source;
- and
- an electron energy filter, configured to reject electron beams having the different energy spectrum, while allowing the passage of electron beams having the original energy spectrum.
A system for electron beam imaging or for electron beam spectroscopy comprising:
- a transmission electron microscope (TEM), comprising an electron source configured to provide an electron beam;
- at least one laser-based device configured to provide at least one laser beam, wherein the laser beam is configured to shift a predetermined portion of the electron beam to a momentum that is different from the momentum originally provided to the predetermined portion of the electron beam by the TEM;
- and
- an aperture, configured to reject the electron beams shifted to the different momentum by the laser-based device, while allowing the passage of electron beams having the original momentum provided by the TEM.
Dependencies are inferred from the claim text.