H01J 37/145
Combinations of electrostatic and magnetic lenses
H01J37/145 (Combinations of electrostatic and magnetic lenses) appears on 182 US grants and 194 published applications in this corpus.
Search patents in H01J- Granted patents
- 182
- Published applications
- 194
- Assignees
- 63
- Inventors
- 317
- Latest grant
- 11 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 1 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 2 | 0 |
| 1999 | 3 | 0 |
| 2000 | 5 | 0 |
| 2001 | 1 | 1 |
| 2002 | 3 | 2 |
| 2003 | 3 | 1 |
| 2004 | 2 | 5 |
| 2005 | 4 | 1 |
| 2006 | 3 | 5 |
| 2007 | 2 | 1 |
| 2008 | 3 | 2 |
| 2009 | 3 | 10 |
| 2010 | 4 | 4 |
| 2011 | 4 | 1 |
| 2012 | 6 | 9 |
| 2013 | 4 | 6 |
| 2014 | 9 | 8 |
| 2015 | 5 | 5 |
| 2016 | 12 | 9 |
| 2017 | 4 | 13 |
| 2018 | 16 | 8 |
| 2019 | 8 | 8 |
| 2020 | 5 | 16 |
| 2021 | 15 | 15 |
| 2022 | 13 | 9 |
| 2023 | 13 | 15 |
| 2024 | 9 | 17 |
| 2025 | 9 | 12 |
| 2026 | 7 | 11 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Adjustable permanent magnetic lens having thermal control device11 Aug 2026US 12,706,270 B2IMS Nanofabrication GmbH
- Charged particle apparatus and method7 Jul 2026US 12,676,278 B2ASML Netherlands B. V.
- Multi charged particle beam writing apparatus12 May 2026US 12,626,886 B2NuFlare Technology, Inc.
- Multi charged particle beam writing apparatus17 Mar 2026US 12,580,148 B2NuFlare Technology, Inc.
- Method of operating a particle beam system, particle beam system, non-transitory storage medium and program3 Feb 2026US 12,542,252 B1Carl Zeiss Microscopy GmbH
- Multi-beam charged particle microscope design with improved detection system for secondary electron imaging over a large range of landing energies of primary electrons17 Sep 2026US 2026/0279723 A1
- Charged Particle Beam Device6 Aug 2026US 2026/0229443 A1Hitachi High-Tech Corporation
- Charged particle beam device23 Jul 2026US 2026/0213117 A1Hitachi High-Tech Corporation
- Charged particle beam inspection apparatus and method23 Jul 2026US 2026/0213118 A1ASML Netherlands B. V.
- Electron Microscope and Specimen Observation Method11 Jun 2026US 2026/0162923 A1JEOL Ltd.
Most cited
By later US patents
- Objective lens with deflector plates immersed in electrostatic lens field110US 8,698,093 B1KLA-Tencor Corporation · 2014
- Scanning electron microscope90US 5,872,358 AHitachi, Ltd. · 1999
- Objective lens for focusing charged particles in an electron microscope52US 4,926,054 AICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · 1990
- Scanning electron microscope52US 5,900,629 AHitachi, Ltd. · 1999
- Objective lens for an electron microscopy system and electron microscopy system45US 6,855,938 B2Carl Zeiss NTS GmbH · 2005