H01J 27/02
Ion sources
Official title: Ion sources; Ion guns {(for examination or processing discharge tubes H01J37/08; ion sources, ion guns for particle spectrometer or separator tubes H01J49/10; ion propulsion F03H1/00)}
H01J27/02 (Ion sources) appears on 1,569 US grants and 1,100 published applications in this corpus.
Search patents in H01J- Granted patents
- 1,569
- Published applications
- 1,100
- Assignees
- 609
- Inventors
- 2,577
- Latest grant
- 18 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 18 | 0 |
| 1977 | 6 | 0 |
| 1978 | 15 | 0 |
| 1979 | 10 | 0 |
| 1980 | 11 | 0 |
| 1981 | 15 | 0 |
| 1982 | 14 | 0 |
| 1983 | 14 | 0 |
| 1984 | 16 | 0 |
| 1985 | 18 | 0 |
| 1986 | 24 | 0 |
| 1987 | 33 | 0 |
| 1988 | 40 | 0 |
| 1989 | 26 | 0 |
| 1990 | 30 | 0 |
| 1991 | 28 | 0 |
| 1992 | 26 | 0 |
| 1993 | 18 | 0 |
| 1994 | 22 | 0 |
| 1995 | 20 | 0 |
| 1996 | 22 | 0 |
| 1997 | 21 | 0 |
| 1998 | 22 | 0 |
| 1999 | 34 | 0 |
| 2000 | 26 | 0 |
| 2001 | 25 | 8 |
| 2002 | 16 | 25 |
| 2003 | 40 | 28 |
| 2004 | 32 | 40 |
| 2005 | 31 | 31 |
| 2006 | 34 | 43 |
| 2007 | 31 | 58 |
| 2008 | 29 | 45 |
| 2009 | 53 | 53 |
| 2010 | 44 | 50 |
| 2011 | 30 | 53 |
| 2012 | 42 | 46 |
| 2013 | 52 | 75 |
| 2014 | 73 | 87 |
| 2015 | 79 | 61 |
| 2016 | 70 | 58 |
| 2017 | 62 | 53 |
| 2018 | 51 | 48 |
| 2019 | 52 | 34 |
| 2020 | 36 | 43 |
| 2021 | 35 | 39 |
| 2022 | 33 | 31 |
| 2023 | 32 | 36 |
| 2024 | 27 | 23 |
| 2025 | 20 | 23 |
| 2026 | 11 | 9 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- H01J 27/08Using arc discharge411
- H01J 27/022Details408
- H01J 27/16Using high-frequency excitation264
- H01J 27/20Using particle beam bombardment222
- H01J 27/26Using surface ionisation222
- H01J 27/24Using photo-ionisation78
- H01J 27/028Negative ion sources75
- H01J 27/04Using reflex discharge71
All 9 subgroupsShow fewer
Recent patents
- Ion generation device and ion implanter18 Aug 2026US 12,712,144 B2Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Ion beam extraction apparatus and method for creating an ion beam28 Jul 2026US 12,695,045 B2MAX-PLANCK-GESELLSCHAFT zur FOERDERUNG der WISSENSCHAFTEN.e.V
- Ion milling apparatus16 Jun 2026US 12,658,399 B2Hitachi High-Tech Corporation
- Photoionization detector sensor utilizing time division modes to perform separation and detection in the same physical region9 Jun 2026US 12,650,414 B2Honeywell International Inc.
- Mixed-gas species plasma source system21 Apr 2026US 12,609,276 B2FEI Company
- Devices and Methods for Creation of Exotic Vacuum Objects13 Aug 2026US 2026/0237588 A1Magnetic Miles, LLC
- Field emission source for ion mobility spectrometry23 Jul 2026US 2026/0210910 A1Verily Life Sciences LLC
- Ion source28 May 2026US 2026/0150177 A1Nissin Ion Equipment Co., Ltd.
- Ion source head and ion source head curved liner, deflector, or repeller23 Apr 2026US 2026/0112567 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Ion implantation method and solid source material used for ion generation26 Feb 2026US 2026/0058087 A1Sumitomo Heavy Industries Ion Technology Co., Ltd.
Most cited
By later US patents
- Ion source having auxillary ion chamber423US 5,107,170 ANissin Electric Co., Ltd. · 1992
- Toroidal low-field reactive gas source362US 6,150,628 AApplied Science and Technology, Inc. · 2000
- Ion source231US 6,645,301 B2Saintech Pty Ltd. · 2003
- Ion source167US 6,849,854 B2Saintech Pty Ltd. · 2005
- Inductively-coupled toroidal plasma source162US 6,815,633 B1Applied Science and Technology, Inc. · 2004