H01J 27/20
Using particle beam bombardment
Official title: using particle {beam} bombardment, e.g. ionisers
H01J27/20 (Using particle beam bombardment) appears on 222 US grants and 173 published applications in this corpus.
Search patents in H01J- Granted patents
- 222
- Published applications
- 173
- Assignees
- 134
- Inventors
- 455
- Latest grant
- 24 Mar 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 3 | 0 |
| 1977 | 1 | 0 |
| 1978 | 3 | 0 |
| 1979 | 3 | 0 |
| 1980 | 2 | 0 |
| 1981 | 3 | 0 |
| 1982 | 0 | 0 |
| 1983 | 2 | 0 |
| 1984 | 2 | 0 |
| 1985 | 2 | 0 |
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 3 | 0 |
| 1990 | 0 | 0 |
| 1991 | 5 | 0 |
| 1992 | 9 | 0 |
| 1993 | 3 | 0 |
| 1994 | 4 | 0 |
| 1995 | 5 | 0 |
| 1996 | 3 | 0 |
| 1997 | 2 | 0 |
| 1998 | 1 | 0 |
| 1999 | 7 | 0 |
| 2000 | 1 | 0 |
| 2001 | 2 | 1 |
| 2002 | 2 | 2 |
| 2003 | 3 | 2 |
| 2004 | 2 | 7 |
| 2005 | 2 | 3 |
| 2006 | 6 | 4 |
| 2007 | 3 | 11 |
| 2008 | 2 | 5 |
| 2009 | 5 | 8 |
| 2010 | 8 | 3 |
| 2011 | 5 | 1 |
| 2012 | 3 | 6 |
| 2013 | 6 | 6 |
| 2014 | 4 | 17 |
| 2015 | 10 | 7 |
| 2016 | 6 | 9 |
| 2017 | 19 | 13 |
| 2018 | 7 | 11 |
| 2019 | 14 | 11 |
| 2020 | 11 | 12 |
| 2021 | 9 | 9 |
| 2022 | 7 | 8 |
| 2023 | 9 | 7 |
| 2024 | 6 | 5 |
| 2025 | 3 | 4 |
| 2026 | 2 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Mass spectrometer24 Mar 2026US 12,586,770 B2Shimadzu Corporation
- Negative ion source and negative ion generation method24 Feb 2026US 12,558,663 B2Japan Atomic Energy Agency
- Ion source assembly with multiple elliptical filaments9 Dec 2025US 12,494,358 B2Inficon GmbH
- Isothermal ion source with auxiliary heaters4 Nov 2025US 12,463,001 B2SHINE Technologies, LLC
- Ion implanter, ion implantation method, and semiconductor device manufacturing method18 Mar 2025US 12,255,039 B2Sumitomo Heavy Industries, Ltd.
- Ion source28 May 2026US 2026/0150177 A1Nissin Ion Equipment Co., Ltd.
- Gas cluster ion beam apparatus25 Dec 2025US 2025/0391627 A1IIPT Inc.
- A method and arrangement for negative ion production18 Dec 2025US 2025/0385063 A1JyväSkyläN Yliopisto
- Ion source for neutron generator usable in wellbore29 May 2025US 2025/0176091 A1Halliburton Energy Services.Inc.
- Axial ion source with magnetic field adjustment30 Jan 2025US 2025/0037985 A1
Most cited
By later US patents
- Film deposition111US 3,961,103 ASpace Sciences Corporation · 1976
- Electron beam excitation ion source42US 5,028,791 ATokyo Electron Limited · 1991
- Ion implantation system and control method36US 7,609,003 B2SemEquip, Inc. · 2009
- Magnetically-filtered cathodic arc plasma apparatus35US 5,317,235 AISM Technolog · 1994
- Electron impact ion source35US 6,686,595 B2SemEquip, Inc. · 2004