US 5,317,235 A · Magnetically-filtered cathodic arc plasma apparatus

Abstract

A cathodic arc metal deposition apparatus that prevents the deposition of metal droplets with the metal ions being deposited. The cathode has an annular configuration. An annular solenoidal magnet is positioned adjacent to the cathode with their central openings in alignment. The opening diameters and spacings of the cathode and magnet is such that no line of sight exists between the cathode and a target to be coated. Preferably, the arc is initiated between the cathode and an annular anode located around the cathode, separated from the cathode by an insulating layer. The arc is initiated by a high voltage pulse formed between a trigger electrode ring within the cathode opening and the cathode. In an alternative embodiment, a plurality of individual cathodes are positioned in a circle in place of the single ring electrode. The anode may surround the set of cathodes, or may be a screen between the cathodes and the magnet. A multi-screen extractor is preferably provided to direct ions toward the target.

Claims25

Dependent claims

A magnetically filtered cathodic arc deposition apparatus which comprises:

generally annular cathode means;
anode means spaced from said cathode means;
cathode arc initiating means adjacent to said cathode means;
a target area spaced from said cathode means adapted to contain a target to receive ions generated at said cathode means;
an annular solenoidal magnet spaced from said cathode means, between said cathode means and said target;
the opening in said annular magnet being aligned with said cathode means such that no straight line exists between any location on said cathode means and any location on said target area.

3 more elements

Dependencies are inferred from the claim text.

Magnetically-filtered cathodic arc plasma apparatus

Life of this patent

Magnetically-filtered cathodic arc plasma apparatus

Life of this patent

Abstract

Claims25