Ion source

Abstract

An ion source includes a vaporizer that includes a crucible that is long in a longitudinal direction and a nozzle connected to the crucible at a connecting portion of the crucible, a plasma generation chamber to which gas is supplied from the crucible through the nozzle, and a controller that controls a temperature of the vaporizer. The controller controls the temperature of the vaporizer in response to a temperature of the plasma generation chamber or in response to a parameter correlated with the temperature of the plasma generation chamber so that a temperature of the connecting portion is higher than a temperature of a central portion of the crucible in the longitudinal direction.

Dependencies are inferred from the claim text.